1 季华实验室，广东 佛山 528200
2 佛山科学技术学院 机电工程与自动化学院，广东 佛山 528225
3 华中科技大学 光学与电子信息学院，湖北 武汉 430074
随着新能源、特高压需求爆发，以单晶碳化硅为代表的第三代半导体技术近几年得到了飞速发展，大口径单晶碳化硅材料制备已经成为现实，相比于目前已成熟应用的RB-SiC材料，单晶碳化硅不需要通过CVD或PVD改性就可以获得1 nm甚至更优的表面粗糙度，在光学元件领域的应用具有广阔前景，但同时加工难度高是亟待解决的问题。为了解决单晶碳化硅材料在光学加工过程中的粗糙度问题，提出了一种基于PSD评价及熵增理论的伪随机轨迹加工改善粗糙度的方法。相较于传统单一的Ra值评价方法，通过引入PSD曲线丰富了粗糙度评价的维度；利用对熵增理论的分析，从理论上讨论了确定性抛光轨迹和伪随机轨迹对粗糙度尺度下累计误差影响的区别。通过对6 in (1 in=2.54 cm)单晶碳化硅进行多轮抛光实验，结果表明：在相同初始粗糙度情况下，确定性轨迹与伪随机轨迹虽均得到了Ra约1 nm的粗糙度值，但PSD曲线可以明显看出确定性轨迹出现了尖峰，而伪随机轨迹则更为平滑。验证了特定采样区间下的PSD曲线作为粗糙度评价手段的有效性，同时论证了伪随机轨迹相较于确定性轨迹在单晶碳化硅材料抛光上的优势。
单晶碳化硅 伪随机轨迹 粗糙度 monocrystalline silicon carbide pseudo-random tool path roughness 红外与激光工程
2023, 52(5): 20220838
Author Affiliations
Abstract
1 Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China
2 University of Chinese Academy of Sciences, Beijing, 100049, China
3 Key Laboratory of Optical System Advanced Manufacturing Technology, Chinese Academy of Sciences, Changchun, 130033, China
A rigid conformal (RC) lap can smooth mid-spatial-frequency (MSF) errors, which are naturally smaller than the tool size, while still removing large-scale errors in a short time. However, the RC-lap smoothing efficiency performance is poorer than expected, and existing smoothing models cannot explicitly specify the methods to improve this efficiency. We presented an explicit time-dependent smoothing evaluation model that contained specific smoothing parameters directly derived from the parametric smoothing model and the Preston equation. Based on the time-dependent model, we proposed a strategy to improve the RC-lap smoothing efficiency, which incorporated the theoretical model, tool optimization, and efficiency limit determination. Two sets of smoothing experiments were performed to demonstrate the smoothing efficiency achieved using the time-dependent smoothing model. A high, theory-like tool influence function and a limiting tool speed of 300 RPM were obtained.
Optics design and fabrication Optics design and fabrication optics fabrication optics fabrication polishing polishing Photonic Sensors
2017, 7(2): 171–181
运用拉普拉斯方程，分析了液体界面面型与密度差以及界面张力之间的关系。采用新兴的离子液体作为导电液体，选取常见的四种绝缘液体，得到了存在密度差的导电液体和绝缘液体的四种组合形式。基于这四种组合形式的双液体透镜系统模型，分别仿真计算了相应的非球面界面面型方程，并对含有非球面界面的液体透镜进行了成像分析。得出结论，相比于界面为球面的液体透镜，使用非球面界面的液体透镜时，成像质量得到很好的改善，但其非球面度和成像质量没有正相关性。
电润湿 液体透镜 离子液体 非球面 像质 electro-wetting liquid lens ionic liquid aspheric interface image quality
